The effect of the silicon top layer of silicon implanted with oxygen on the uptake and release of deuterium

Zimmerman, L; de Nijs, JMM; Alkemade, Paul F.A.; Westerduin, KT; van Veen, A

The effect of the silicon top layer of silicon implanted with oxygen on the uptake and release of deuterium

Journal article (1998)

Authors

L Zimmerman External organisation

JMM de Nijs External organisation

Paul F.A. Alkemade Old - sect Electronic Materials (NS/EM)

KT Westerduin Old - Section Defects in Materials

A van Veen Old - Section Defects in Materials

Research Group

Old - sect Electronic Materials (NS/EM)

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Published Date

1998

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Research Group

Old - sect Electronic Materials (NS/EM)

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