Response time of silicon photodiodes for DUV/EUV radiation
Conference Paper
(2008)
Author(s)
S. Xia (TU Delft - Electronic Instrumentation)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
R Naulaerts (External organisation)
S. Nihtianova (TU Delft - Electronic Instrumentation)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:12691621-463d-4f2f-9313-17f84532175e
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
1956-1959
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