Response time of silicon photodiodes for DUV/EUV radiation

Conference Paper (2008)
Author(s)

S. Xia (TU Delft - Electronic Instrumentation)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

R Naulaerts (External organisation)

Stoyan Nihtianova (TU Delft - Electronic Instrumentation)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
1956-1959

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