Fiber-coupled displacement interferometry without periodic nonlinearity

Journal Article (2011)
Author(s)

JD Ellis (TU Delft - Mechatronic Systems Design)

Adrianus J.H. Meskers (TU Delft - Mechatronic Systems Design)

J.W. Spronck (TU Delft - Mechatronic Systems Design)

RH Munnig Schmidt (TU Delft - Mechatronic Systems Design)

Research Group
Mechatronic Systems Design
More Info
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Publication Year
2011
Language
English
Research Group
Mechatronic Systems Design
Issue number
18
Volume number
36
Pages (from-to)
3584-3586

Abstract

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinarity in both free-space and fiber-delivered variants.

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