Preparation of large poly-Si grains by excimer laser crystallization of sputtered a-Si film with processing temperature of 100 °C

Conference paper (2006)

Authors

M He Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

EJJ Neihof Electronic Components, Technology and Materials -

Y van Andel Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2006

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials