Nanoelectromechanical sensors based on suspended 2D materials
Max C. Lemme (AMICA, RWTH Aachen University)
Stefan Wagner (AMICA)
Kangho Lee (University of the Federal Armed Forces Munich)
Xuge Fan (KTH Royal Institute of Technology)
Gerard J. Verbiest (TU Delft - Dynamics of Micro and Nano Systems)
Sebastian Wittmann (Infineon Technologies AG)
Sebastian Lukas (RWTH Aachen University)
Robin J. Dolleman (RWTH Aachen University)
Frank Niklaus (KTH Royal Institute of Technology)
Herre S.J. van der Zant (Kavli institute of nanoscience Delft, TU Delft - QN/van der Zant Lab)
Georg S. Duesberg (University of the Federal Armed Forces Munich)
Peter G. Steeneken (TU Delft - QN/Steeneken Lab, Kavli institute of nanoscience Delft, TU Delft - Dynamics of Micro and Nano Systems)
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Abstract
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
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