Towards Grating Reconstruction in Coherent Fourier Scatterometry
Conference Paper
(2013)
Author(s)
N. Kumar (TU Delft - ImPhys/Optics)
S. Roy (TU Delft - ImPhys/Optics)
Omar Gawhary (TU Delft - ImPhys/Optics)
Silvania Pereira (TU Delft - ImPhys/Optics)
WMJ Coene (External organisation)
Paul Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:1ae63dc7-34f0-493b-b3ee-a8cb9c59ac16
More Info
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Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Pages (from-to)
591-594
ISBN (print)
978-3-642-36358-0
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