Ultra-sensitive graphene membranes for microphone applications

Journal article (2023)

Authors

G. Baglioni Kavli institute of nanoscience Delft, QN/van der Zant Lab - AS
R. Pezone Electronic Components, Technology and Materials - EEMCS
S. Vollebregt Electronic Components, Technology and Materials - EEMCS
Katarina Cvetanović Zobenica University of Belgrade
Marko Spasenović University of Belgrade
Dejan Todorović Dirigent Acoustics Ltd
Hanqing Liu Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
G.J. Verbiest Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
H.S.J. van der Zant QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft
P.G. Steeneken QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft, Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
QN/van der Zant Lab (AS) (TU Delft)
Copyright: © 2023 G. Baglioni, R. Pezone, S. Vollebregt, Katarina Cvetanović Zobenica, Marko Spasenović, Dejan Todorović, Hanqing Liu, G.J. Verbiest, H.S.J. van der Zant, P.G. Steeneken
DOI: https://doi.org/10.1039/d2nr05147h
More Info
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Published Date

2023

Language

English

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/van der Zant Lab

Abstract

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10-15 dB lower than that featured by current MEMS microphones.