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Ultra-sensitive graphene membranes for microphone applications

Journal Article (2023)
Author(s)

G. Baglioni (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)

R. Pezone (TU Delft - Electronic Components, Technology and Materials)

S. Vollebregt (TU Delft - Electronic Components, Technology and Materials)

Katarina Zobenica (University of Belgrade)

Marko Spasenović (University of Belgrade)

Dejan Todorović (Dirigent Acoustics Ltd)

Hanqing Liu (TU Delft - Dynamics of Micro and Nano Systems)

G.J. Verbiest (TU Delft - Dynamics of Micro and Nano Systems)

H.S.J. van der Zant (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)

P.G. Steeneken (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab, TU Delft - Dynamics of Micro and Nano Systems)

Research Group
QN/van der Zant Lab
Copyright
© 2023 G. Baglioni, R. Pezone, S. Vollebregt, Katarina Cvetanović Zobenica, Marko Spasenović, Dejan Todorović, Hanqing Liu, G.J. Verbiest, H.S.J. van der Zant, P.G. Steeneken
DOI related publication
https://doi.org/10.1039/d2nr05147h
More Info
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Publication Year
2023
Language
English
Copyright
© 2023 G. Baglioni, R. Pezone, S. Vollebregt, Katarina Cvetanović Zobenica, Marko Spasenović, Dejan Todorović, Hanqing Liu, G.J. Verbiest, H.S.J. van der Zant, P.G. Steeneken
Research Group
QN/van der Zant Lab
Issue number
13
Volume number
15
Pages (from-to)
6343-6352
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Abstract

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10-15 dB lower than that featured by current MEMS microphones.