Deep p+ junctions formed by drive-in from pure boron depositions

Maleki, P; Scholtes, TLM; Popadic, M; Sarubbi, F; Lorito, G.; Milosavljević, S; de Boer, W.B.; Nanver, LK

Deep p+ junctions formed by drive-in from pure boron depositions

Conference paper (2010)

Authors

P Maleki Electronic Components, Technology and Materials

TLM Scholtes Electronic Components, Technology and Materials

M Popadic Electronic Components, Technology and Materials

F Sarubbi Electronic Components, Technology and Materials

G. Lorito Electronic Components, Technology and Materials

S Milosavljević Electronic Components, Technology and Materials

W.B. de Boer Electronic Components, Technology and Materials

LK Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:20cf116c-dcb3-46f1-8d72-e175aa0d0023

More Info

expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Components, Technology and Materials

No files available

Metadata only record. There are no files for this conference paper.