Deep p+ junctions formed by drive-in from pure boron depositions

P Maleki (TU Delft - Electronic Components, Technology and Materials)

TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)

M Popadic (TU Delft - Electronic Components, Technology and Materials)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

G. Lorito (TU Delft - Electronic Components, Technology and Materials)

S Milosavljević (TU Delft - Electronic Components, Technology and Materials)

W.B. De Boer (TU Delft - Electronic Components, Technology and Materials)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)