Characterization of a bulk-micromachined post-process module for silicon RF technology

Conference paper (2000)

Authors

TK Ng Old - EWI Ch. Integrated Sensing Devices

PN Pham Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

B. Rajaei Salmasi Old - EWI Ch. Integrated Sensing Devices

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Old - EWI Ch. Integrated Sensing Devices

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Published Date

2000

Language

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Research Group

Old - EWI Ch. Integrated Sensing Devices