Characterization of a bulk-micromachined post-process module for silicon RF technology
Conference Paper
(2000)
Author(s)
TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
B. Rejaei Salmassi (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Old - EWI Ch. Integrated Sensing Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:2200f870-4df4-4952-af46-0393328b4e87
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Publication Year
2000
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
99-102
ISBN (print)
0-7803-6255-1
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