The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film
Conference Paper
(2008)
Author(s)
C.A. Yuan (TU Delft - Computational Design and Mechanics)
AE Flower (External organisation)
O van der Sluis (TU Delft - Computational Design and Mechanics)
G. Zhang (TU Delft - Dynamics of Micro and Nano Systems)
Leo Ernst (TU Delft - Computational Design and Mechanics)
M Cherkaoui (External organisation)
Willem van Driel (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Computational Design and Mechanics
To reference this document use:
https://resolver.tudelft.nl/uuid:22c74694-c1c6-48d8-8667-9fe24badd5f6
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Publication Year
2008
Research Group
Computational Design and Mechanics
Pages (from-to)
27-30
ISBN (print)
978-1-4244-2127-5
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