Photonic hybrid assembly through flexible waveguides

Conference Paper (2016)
Author(s)

Kerstin Wörhoff (LioniX International BV)

Albert Prak (LioniX International BV)

F. Postma (LioniX International BV)

A Leinse (LioniX International BV)

Kai Wu (TU Delft - Micro and Nano Engineering)

T. J. Peters (TU Delft - Micro and Nano Engineering)

M. Tichem (TU Delft - Micro and Nano Engineering)

B. Amaning-Appiah (Aifotec AG)

V. Renukappa (Aifotec AG)

G. Vollrath (Aifotec AG)

J. Balcells-Ventura (IMST GmbH)

P. Uhlig (IMST GmbH)

M. Seyfried (ficonTEC Service GmbH)

D. Rose (ficonTEC Service GmbH)

Raquel Santos (Eindhoven University of Technology)

X. J.M. Leijtens (Eindhoven University of Technology)

B. Flintham (Oclaro Technology, Inc.)

M. Wale (Oclaro Technology, Inc.)

D. Robbins (Willow Photonics, Ltd.)

Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1117/12.2227814
More Info
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Publication Year
2016
Language
English
Research Group
Micro and Nano Engineering
Volume number
9891
Article number
98911P
ISBN (electronic)
978-1-510601369
Event
Silicon Photonics and Photonic Integrated Circuits V (2016-04-03 - 2016-04-07), Brussels, Belgium
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Abstract

Fully automated, high precision, cost-effective assembly technology for photonic packages remains one of the main challenges in photonic component manufacturing. Next to the cost aspect the most demanding assembly task for multiport photonic integrated circuits (PICs) is the high-precision (±0.1 μm) alignment and fixing required for optical I/O in InP PICs, even with waveguide spot size conversion. In a European research initiative - PHASTFlex - we develop and investigate an innovative, novel assembly concept, in which the waveguides in a matching TriPleX interposer PIC are released during fabrication to make them movable. After assembly of both chips by flip-chip bonding on a common carrier, TriPleX based actuators and clamping functions position and fix the flexible waveguides with the required accuracy.

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