EUV phase mask engineering based on image optimisation.
Journal Article
(2006)
Author(s)
A.M. Nugrowati (TU Delft - ImPhys/Optics)
A.S. van de Nes (TU Delft - ImPhys/Optics)
S.F. Pereira (TU Delft - ImPhys/Optics)
J.J.M. Braat (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:2583c0a6-34a1-4e11-b32c-88f6fd0670ed
More Info
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Publication Year
2006
Research Group
ImPhys/Optics
Volume number
83
Pages (from-to)
684-687
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