EUV phase mask engineering based on image optimisation.

Journal Article (2006)
Author(s)

A.M. Nugrowati (TU Delft - ImPhys/Optics)

A.S. van de Nes (TU Delft - ImPhys/Optics)

S.F. Pereira (TU Delft - ImPhys/Optics)

J.J.M. Braat (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
More Info
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Publication Year
2006
Research Group
ImPhys/Optics
Volume number
83
Pages (from-to)
684-687

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