14 records found
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Significant role of phase mask structures in extreme ultraviolet lithopgraphy to achieve near-wavelength resolution. IN PRESS
Studying light Diffraction at A Small Scale: applications and theories.
Near field intermediate fields of an ultrashort pulse transmitted through Young's double-slit experiment.
Combining various optical simulations tools to enable complex optical systems simulations.
Vectorial Diffrection of Extreme Ultraviolet Light and Ultrashort Light Pulses.
Polarisation-sensitive ultrashort pulse shaping by narrow metal slits
Erratum: Interference or not: Analysis of the young's experiment for a single-cycle pulse
Numerical analysis of aslit-groove diffrection problem
Rigorous calculation of the time evolution of an ultrashort pulse through slit structures in the near and intermediate zones.
Resolution enhancement in extreme ultraviolet lithography: the imaging of a 2-D reflecting phase shifting mask with conical illumination.
EUV phase mask engineering based on image optimisation.
Enhanced imaging in Extreme UV lithography by optimising the Molybdenum/Silicon thickness ratio in 2-D phase shifting mask design.