Through-wafer electrical vias for RF silicon technology

Conference Paper (2003)
Author(s)

Z Wang (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

L Wang (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Old - EWI Ch. Integrated Sensing Devices
More Info
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Publication Year
2003
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
761-765
ISBN (print)
90-73461-39-1

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