Concept evaluation of a high performance self aligning capacitive displacement sensor

Conference paper (2010)

Authors

S. Xia Electronic Instrumentation - EEMCS
J.P. van Schieveen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
S. Nihtianova Electronic Instrumentation - EEMCS
J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation