An Experimental-Numerical Study of Metal Peel Off in Cu/low-k Back-End Structures
Conference Paper
(2006)
Author(s)
René Kregting (External organisation)
RBR van Silfhout (External organisation)
O van der Sluis (TU Delft - Computational Design and Mechanics)
RAB Engelen (External organisation)
Willem D. van Driel (TU Delft - Dynamics of Micro and Nano Systems)
Guogi Zhang (TU Delft - Computational Design and Mechanics)
Research Group
Computational Design and Mechanics
To reference this document use:
https://resolver.tudelft.nl/uuid:2c7ddeb5-45b3-4f49-b356-9a707ec6cadf
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Publication Year
2006
Research Group
Computational Design and Mechanics
Pages (from-to)
210-215
ISBN (print)
1-4244-0620-X
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