Ultra-high aspect ratio FinFet technology
Journal Article
(2010)
Author(s)
V Jovanovic (TU Delft - Electronic Components, Technology and Materials)
T Suligoj (External organisation)
M Poljak (External organisation)
Y Civale (TU Delft - Old - EWI Sect. ECTM)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.sse.2010.04.021
To reference this document use:
https://resolver.tudelft.nl/uuid:2ca9789b-8508-4609-975a-7d4c8da55a24
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
9
Volume number
54
Pages (from-to)
870-876
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