A micromachining post-process module for RF silicon technology
Conference Paper
(2000)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
M. Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
B. Rajaei Salmasi (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:32744322-c063-4af9-99d2-e3bf4fe8f53f
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
ISBN (print)
0-7803-6438-4
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