Design of a Setup for Modal Testing of Micro-Cantilevers Immersed in Liquid
B. van den Brink (TU Delft - Mechanical Engineering)
Farbod Alijani – Mentor
Murali Krishna Krishna Ghatkesar – Mentor
P. G. Steeneken – Graduation committee member
J.F.L. Goosen – Graduation committee member
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Abstract
To facilitate research on the dynamics of micro-cantilevers immersed in liquid, a modal test setup was designed. Modal testing is a powerful form of dynamic testing whereby the system's natural frequencies, modal masses, modal damping ratios, mode shapes, and weight of each of these modes at a certain frequency are determined. Micro-cantilever resonators are often used for sensing applications, where information is extrapolated from the change in dynamical behavior. Such systems are used in liquid environments to characterize the fluid density and viscosity, to measure the mass and stiffness of particles suspended in this liquid, and to image biological samples using atomic force microscopy. The designed setup employs piezoelectric base actuation to excite the cantilevers, of which the response is measured in vacuum, air, and water. A clean and spurious free response is achieved in a bandwidth ranging from 20 kHz to 500 kHz in vacuum and air, and a bandwidth ranging from 50 kHz to 500 kHz in water.