Design of a Setup for Modal Testing of Micro-Cantilevers Immersed in Liquid

Master thesis (2017)

Authors

B. van den Brink Mechanical Engineering

Contributors

F. Alijani (supervisor 1)
M.K. Ghatkesar (supervisor 1)
P.G. Steeneken (supervisor 2)
J.F.L. Goosen (supervisor 2)
Faculty
Mechanical Engineering
Copyright: © 2017 Bram van den Brink
AFM Dynamics Vacuum Atomic force Microscope Modal Analysis Modal Testing Microsystems Micro-cantilevers Liquid Vibration Analysis
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Published Date

04-12-2017

Language

English

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Faculty

Mechanical Engineering

Abstract

To facilitate research on the dynamics of micro-cantilevers immersed in liquid, a modal test setup was designed. Modal testing is a powerful form of dynamic testing whereby the system's natural frequencies, modal masses, modal damping ratios, mode shapes, and weight of each of these modes at a certain frequency are determined. Micro-cantilever resonators are often used for sensing applications, where information is extrapolated from the change in dynamical behavior. Such systems are used in liquid environments to characterize the fluid density and viscosity, to measure the mass and stiffness of particles suspended in this liquid, and to image biological samples using atomic force microscopy. The designed setup employs piezoelectric base actuation to excite the cantilevers, of which the response is measured in vacuum, air, and water. A clean and spurious free response is achieved in a bandwidth ranging from 20 kHz to 500 kHz in vacuum and air, and a bandwidth ranging from 50 kHz to 500 kHz in water.