Large Polycrystalline Silicon Grains Prepared by Excimer Laser Crystallization of Sputtered Amorphous Silicon Film with Process Temperature at 100C

Journal article (2007)

Authors

M He Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

EJJ Neihof Electronic Components, Technology and Materials -

Y van Andel Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

JW Metselaar Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials