Active Positioning and Passive Fixation using Friction

in Capacitive Displacement Measurement Applications

Doctoral thesis (2016)

Authors

O.S. van de Ven Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2016 O.S. van de Ven
DOI
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https://doi.org/10.4233/uuid:3fd41e9c-734e-45f9-aca0-c5e658d13657
Friction Thermal actuator Impact Creep Capacitive sensor Aliginment Presliding Contact Force pulse
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Published Date

2016

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

Sensor positioning is critical for achieving a measurement accuracy in the picometre range with capacitive displacement sensors. This thesis discusses the contradictory requirements that the sensor alignment application imposes: motion capability combined with extreme displacement stability. In addition, it explores three micrometre scale positioning methods that do not compromise the position stability. All three positioning methods use the properties of friction contacts to achieve the combination of stability and position ability.