Characterization of amorphous boron layers as diffusion barrier for pure aluminium

Conference paper (2010)

Authors

A. Sakic Electronic Components, Technology and Materials -

V. Jovanovic Electronic Components, Technology and Materials -

P Maleki Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

S. Milosavljevic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials