Simple heterodyne laser interferometer with subnanometer periodic errors
Journal Article
(2009)
Author(s)
K Joo (TU Delft - Mechatronic Systems Design)
J.D. Ellis (TU Delft - Mechatronic Systems Design)
J. W. Spronck (TU Delft - Mechatronic Systems Design)
JM van Kan (External organisation)
Robert Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:4529c323-929a-4a4d-a721-c2b805e0472f
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Mechatronic Systems Design
Issue number
3
Volume number
34
Pages (from-to)
386-388
No files available
Metadata only record. There are no files for this record.