Simple heterodyne laser interferometer with subnanometer periodic errors

Journal article (2009)

Authors

K Joo Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.D. Ellis Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

JM van Kan External organisation

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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http://resolver.tudelft.nl/uuid:4529c323-929a-4a4d-a721-c2b805e0472f

Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design