Transient ALD simulations for a multi-wafer reactor with trenched wafers
Journal Article
(2007)
Author(s)
AM Lankhorst (External organisation)
BD Paarhuis (External organisation)
H.J.M.C. Terhorst (External organisation)
PJPM Simons (External organisation)
C.R. Kleijn (TU Delft - MSP/Thermal & Materials Processes)
Research Group
MSP/Thermal & Materials Processes
To reference this document use:
https://resolver.tudelft.nl/uuid:45e9aa5f-9f91-4afb-bb5c-010c90d8c14f
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Publication Year
2007
Research Group
MSP/Thermal & Materials Processes
Issue number
22-23 spec.iss
Volume number
201
Pages (from-to)
8842-8848
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