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AM Lankhorst
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2 records found
Transient ALD simulations for a multi-wafer reactor with trenched wafers
Journal article -
AM Lankhorst
,
BD Paarhuis
,
H.J.M.C. Terhorst
,
PJPM Simons
,
C.R. Kleijn
Modelling of Glass-Melting Furnaces: Validation and Application
Conference paper -
GP Boerstoel
,
AM Lankhorst
,
ThH van der Meer