AM Lankhorst | TU Delft Repository

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AM Lankhorst

Conference paper (1)

Journal article (1)

2 records found

1

Transient ALD simulations for a multi-wafer reactor with trenched wafers

Journal article (2007) - AM Lankhorst (author) , BD Paarhuis (author) , H.J.M.C. Terhorst (author) , PJPM Simons (author) , Chris Kleijn (author)

Modelling of Glass-Melting Furnaces: Validation and Application

Conference paper (1997) - GP Boerstoel (author) , AM Lankhorst (author) , ThH van der Meer (author)