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PJPM Simons
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2 records found
Transient ALD simulations for a multi-wafer reactor with trenched wafers
Journal article -
AM Lankhorst
,
BD Paarhuis
,
H.J.M.C. Terhorst
,
PJPM Simons
,
C.R. Kleijn
Growth of ZnO x:Al by high-throughput CVD at atmospheric pressure
Journal article -
Andrea Illiberi
,
PJPM Simons
,
AC Janssen
,
EHA Beckers
,
B Kniknie
,
J van Deelen
,
M.J. Theelen
,
M. Zeman
,
M. Tijssen
,
W Zijlmans
,
HLAH Steijvers
,
D Habets