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PJPM Simons

Journal article (4)

4 records found

1

Growth of ZnO x:Al by high-throughput CVD at atmospheric pressure

Journal article (2012) - Andrea Illiberi (author) , PJPM Simons (author) , AC Janssen (author) , EHA Beckers (author) , B Kniknie (author) , J van Deelen (author) , Mirjam Theelen (author) , Miroslav Zeman (author) , M Tijssen (author) , W Zijlmans (author) , HLAH Steijvers (author) , D Habets (author)

Transient ALD simulations for a multi-wafer reactor with trenched wafers

Journal article (2007) - AM Lankhorst (author) , BD Paarhuis (author) , H.J.M.C. Terhorst (author) , PJPM Simons (author) , Chris Kleijn (author)