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H.J.M.C. Terhorst
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3 records found
Simulation and validation of SiO2 LPCVD from TEOS in a vertical 300 mm multi-wafer reactor
Journal article -
GJ Schoof
,
C.R. Kleijn
,
H.E.A. van den Akker
,
TGM Oosterlaken
,
H.J.M.C. Terhorst
,
F. Huussen
Transient ALD simulations for a multi-wafer reactor with trenched wafers
Journal article -
AM Lankhorst
,
BD Paarhuis
,
H.J.M.C. Terhorst
,
PJPM Simons
,
C.R. Kleijn
Simulation of SiO2 deposition in a vertical 300 mm LPCVD furnace
Conference paper -
GJ Schoof
,
C.R. Kleijn
,
TGM Oosterlaken
,
F. Huussen
,
H.J.M.C. Terhorst