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GJ Schoof

Conference paper (1)

Journal article (1)

2 records found

1

Simulation of SiO2 deposition in a vertical 300 mm LPCVD furnace

Conference paper (2002) - GJ Schoof (author) , Chris Kleijn (author) , TGM Oosterlaken (author) , F. Huussen (author) , H.J.M.C. Terhorst (author)

Simulation and validation of SiO2 LPCVD from TEOS in a vertical 300 mm multi-wafer reactor

Journal article (2002) - GJ Schoof (author) , Chris R. Kleijn (author) , HEA van den Akker (author) , TGM Oosterlaken (author) , H.J.M.C. Terhorst (author) , F. Huussen (author)