Prediction of crack growth in IC passivation layers

Conference paper (2003)

Authors

Y He Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
GQ Zhang External organisation
MAJ van Gils External organisation
RBR van Silfhout External organisation
WD van Driel External organisation
L.J. Ernst Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems