Prediction of crack growth in IC passivation layers
Conference Paper
(2003)
Author(s)
Y He (TU Delft - Dynamics of Micro and Nano Systems)
GQ Zhang (External organisation)
MAJ van Gils (External organisation)
RBR van Silfhout (External organisation)
WD van Driel (External organisation)
Leo Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:496257e0-1469-4a48-b0c1-154a2961d045
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Publication Year
2003
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
323-328
ISBN (print)
0-7803-7054-6
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