Microring Resonator based Force Sensor, with Real-time Temperature-induced Resonance Shift Cancellation
Sahar Safarloo (TU Delft - Dynamics of Micro and Nano Systems)
Wouter Westerveld (TU Delft - Dynamics of Micro and Nano Systems)
Peter G. Steeneken (TU Delft - Precision and Microsystems Engineering)
Amir A. Zadpoor (TU Delft - Biomaterials & Tissue Biomechanics)
Mohammad J. Mirzaali (TU Delft - Biomaterials & Tissue Biomechanics)
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Abstract
Miniaturized optomechanical devices are well-suited for applications in the automotive, aerospace, and biomedical sectors due to their compact size and lightweight design, which make them ideal for measuring small forces [1]. The significant refractive index contrast between the silicon waveguide core and the silicon dioxide cladding in silicon-on-insulator (SOI) structures enables submicron core dimensions. This design supports single-mode propagation at a wavelength of 1.55 µm, with strong optical confinement that allows for sharp bends with radii as small as a few micrometers [2]. Micro-optical-electromechanical systems (MOEMS) offer several advantages over traditional micro-electromechanical systems (MEMS), including higher optical sensitivity, simplicity, cost-effectiveness, and suitability for use in electromagnetically active environments and ultra-high vacuum conditions [3].