Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits
Journal Article
(2013)
Authors
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
AN Chiaramonti (External organisation)
J van der Cingel (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://doi.org/10.7567/JJAP.52.04CB02
TU Delft Repository resolver:
https://resolver.tudelft.nl/50dd8bb1-5898-4dcd-8be9-328bfd41cefc
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
4S
Volume number
52
Pages (from-to)
1-5
DOI:
https://doi.org/10.7567/JJAP.52.04CB02
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