Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

Vollebregt, S.; Chiaramonti, AN; van der Cingel, J.; Beenakker, C.I.M.; Ishihara, R.

Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

Journal article (2013)

Authors

S. Vollebregt Electronic Components, Technology and Materials -

AN Chiaramonti External organisation

J. van der Cingel Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:50dd8bb1-5898-4dcd-8be9-328bfd41cefc

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials