General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.

Journal Article (2008)

Author(s)

S van Haver (TU Delft - ImPhys/Optics)

OTA Janssen (TU Delft - ImPhys/Optics)

Joseph Braat (TU Delft - ImPhys/Optics)

AJEM Janssen (External organisation)

Paul Urbach (TU Delft - ImPhys/Optics)

S.F. Pereira (TU Delft - ImPhys/Optics)

Research Group

ImPhys/Optics

Peer-lijst tijdschrift Professional journal papers

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Publication Year

2008

Research Group

ImPhys/Optics

Issue number

35

Volume number

6924

Pages (from-to)

1-8

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