General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.

Journal article (2008)

Authors

S. van Haver ImPhys/Optics - AS
O.T.A. Janssen ImPhys/Optics - AS
J.J.M. Braat ImPhys/Optics - AS
AJEM Janssen External organisation
Paul Urbach ImPhys/Optics - AS
S.F. Pereira ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics