Preparation of large, location-controlled Si grains by excimer laser crystallization of ¿-Si film sputtered at 100 °C

Conference paper (2006)

Authors

M He Electronic Components, Technology and Materials -

EJJ Neihof Electronic Components, Technology and Materials -

Y van Andel Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

JW Metselaar Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:5242d7ca-2905-4646-b75e-50568ea7f80a

Published Date

2006

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials