Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

Conference paper (2006)

Authors

G. Lorito Old - EWI Sect. ECTM
V Gonda Electronic Components, Technology and Materials - EEMCS
S. Liu External organisation
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
H. Schellevis Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM