Practical considerations of the galvanic etch-stop for device applications

Ashruf, Colin; French, PJ; Sarro, Pasqualina Maria; van der Vlist, W; Oemar, EL; Breems, LJ; Kelly, JJ

Practical considerations of the galvanic etch-stop for device applications

Conference paper (1999)

Authors

Colin Ashruf Electronic Instrumentation

PJ French Electronic Instrumentation

Pasqualina Maria Sarro Electronic Components, Technology and Materials

W van der Vlist Electronic Components, Technology and Materials

EL Oemar External organisation

LJ Breems Electronic Instrumentation

JJ Kelly External organisation

Research Group

Electronic Instrumentation

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Published Date

1999

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Research Group

Electronic Instrumentation

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