Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm
Journal Article
(2008)
Author(s)
OTA Janssen (TU Delft - ImPhys/Optics)
S van Haver (TU Delft - ImPhys/Optics)
AJEM Janssen (External organisation)
Joseph Braat (TU Delft - ImPhys/Optics)
Paul Urbach (TU Delft - ImPhys/Optics)
S.F. Pereira (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:5ac4665a-6df6-4bac-880d-8cf463fdad35
More Info
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Publication Year
2008
Research Group
ImPhys/Optics
Issue number
29
Volume number
6924
Pages (from-to)
1-9
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