Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Journal article (2008)

Authors

O.T.A. Janssen ImPhys/Optics - AS
S. van Haver ImPhys/Optics - AS
AJEM Janssen External organisation
J.J.M. Braat ImPhys/Optics - AS
Paul Urbach ImPhys/Optics - AS
S.F. Pereira ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics