UV and IR Laser-Patterning for High-Density Thin-Film Neural Interfaces

Conference paper (2021)

Authors

A. Velea Fraunhofer Institute for Reliability and Microintegration IZM, Bio-Electronics - EEMCS
J.M. Wilson Fraunhofer Institute for Reliability and Microintegration IZM
A. Pak Bio-Electronics - EEMCS , Fraunhofer Institute for Reliability and Microintegration IZM
Manuel Seckel Fraunhofer Institute for Reliability and Microintegration IZM
Sven Schmidt Fraunhofer Institute for Reliability and Microintegration IZM
Stefan Kosmider Fraunhofer Institute for Reliability and Microintegration IZM
N. Bakhshaee Babaroud Bio-Electronics - EEMCS
W.A. Serdijn Bio-Electronics - EEMCS
Vasiliki Giagka Bio-Electronics - EEMCS , Fraunhofer Institute for Reliability and Microintegration IZM
Research Group
Bio-Electronics (EEMCS) (TU Delft)
Polyurethane High-density microelectrode arrays Thin-film laser drilling Parylene-C
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Published Date

2021

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Bio-Electronics