Fast deposition of microcrystalline silicon with an expanding thermal plasma
Journal Article
(2002)
Author(s)
C Smit (TU Delft - Electronic Components, Technology and Materials)
EAG Hamers (External organisation)
BA Korevaar (TU Delft - Electronic Components, Technology and Materials)
Rene van Swaaij (TU Delft - Electronic Components, Technology and Materials)
MCM van de Sanden (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:5b5b3016-2bc6-4c55-90d2-501ba44cd0af
More Info
expand_more
expand_more
Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Volume number
299/302
Pages (from-to)
98-102
No files available
Metadata only record. There are no files for this record.