Nanofabrication with the helium ion microscope, in 'Metrology, Inspection and process control for microlithography XXIV

Maas, D; Veldhoven, E van; Chen, P; Sidorkin, VA; Salemink, H.W.M.; van der Drift, EWJM; Alkemade, P.F.A.

Nanofabrication with the helium ion microscope, in 'Metrology, Inspection and process control for microlithography XXIV

Journal article (2010)

Authors

D Maas External organisation

E van Veldhoven External organisation

P Chen QN/Kavli Nanolab Delft

VA Sidorkin QN/Kavli Nanolab Delft

H.W.M. Salemink QN/Photronic Devices

EWJM van der Drift QN/Kavli Nanolab Delft

P.F.A. Alkemade QN/Kavli Nanolab Delft

Research Group

QN/Kavli Nanolab Delft

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2010

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Research Group

QN/Kavli Nanolab Delft

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