Nanofabrication with the helium ion microscope, in 'Metrology, Inspection and process control for microlithography XXIV
Journal Article
(2010)
Author(s)
D Maas (External organisation)
E van Veldhoven (External organisation)
P Chen (TU Delft - QN/Kavli Nanolab Delft)
VA Sidorkin (TU Delft - QN/Kavli Nanolab Delft)
H. W.M. Salemink (TU Delft - QN/Photronic Devices)
Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)
PFA Alkemade (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:5bd1eba9-1d5d-42ab-9732-4f6de2f214ed
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Publication Year
2010
Research Group
QN/Kavli Nanolab Delft
Issue number
763814
Volume number
7638
Pages (from-to)
763814-1-763814-10
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