Nanofabrication with the helium ion microscope, in 'Metrology, Inspection and process control for microlithography XXIV

D Maas (External organisation)

E van Veldhoven (External organisation)

P Chen (TU Delft - QN/Kavli Nanolab Delft)

VA Sidorkin (TU Delft - QN/Kavli Nanolab Delft)

H.W.M. Salemink (TU Delft - QN/Photronic Devices)

E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)

P.F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft)