Material properties and growth process of microcrystalline silicon with growth rates in excess of 1 nm/s

Conference paper (2001)

Authors

EAG Hamers External organisation
AHM Smets External organisation
C Smit Electronic Components, Technology and Materials - EEMCS
JPM Hoefnagels External organisation
WMM Kessels External organisation
MCM van de Sanden External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2001

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials