Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions
Conference Paper
(2009)
Author(s)
C Biasotto (TU Delft - Electronic Components, Technology and Materials)
V Jovanovic (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:62c51b21-be60-4628-b69c-537c38fff979
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
189-192
ISBN (print)
978-90-73461-62-8
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