Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions

Biasotto, C; Jovanovic, V.; Nanver, L.K.; van der Cingel, J.

Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions

Conference paper (2009)

Authors

C Biasotto Electronic Components, Technology and Materials -

V. Jovanovic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:62c51b21-be60-4628-b69c-537c38fff979

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials