Towards wafer-scale 2D material sensors
P.G. Steeneken (TU Delft - Precision and Microsystems Engineering)
M. Soikkeli (VTT Technical Research Center of Finland)
R. Pezone (TU Delft - Electronic Components, Technology and Materials)
S. Vollebregt (TU Delft - Electronic Components, Technology and Materials)
M.J.A. Houmes (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)
G.J. Verbiest (TU Delft - Dynamics of Micro and Nano Systems)
F. Alijani (TU Delft - Dynamics of Micro and Nano Systems)
D. Shin (Korea University, TU Delft - Dynamics of Micro and Nano Systems)
H.S.J. van der Zant (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)
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Abstract
The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.
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