Fabrication of accelerometers by thin-SOI micromachining
Conference Paper
(2008)
Author(s)
V Rajaraman (TU Delft - Electronic Instrumentation)
L.S. Pakula (TU Delft - Electronic Instrumentation)
Kofi A. Makinwa (TU Delft - Electronic Instrumentation)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:68593f16-0fdc-4df5-8c4e-4ed8388674d4
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
978-90-74702-54-6
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