Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

Conference Paper (2010)
Authors

A. Sakic (TU Delft - Electronic Components, Technology and Materials)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

G van Veen (External organisation)

K Kooijman (External organisation)

P. Vogelsang (External organisation)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

Wiebe De Boer (TU Delft - Electronic Components, Technology and Materials, Old - EWI Sect. ECTM)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

S. Milosavljevic (TU Delft - Electronic Components, Technology and Materials)

CTH Heerkens (ImPhys/Charged Particle Optics)

T Knezevic (External organisation)

I Spee (External organisation)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4

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