Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

A. Sakic (TU Delft - Electronic Components, Technology and Materials)

L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)

G van Veen (External organisation)

K Kooijman (External organisation)

P. Vogelsang (External organisation)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

Wiebe de Boer (TU Delft - Electronic Components, Technology and Materials, TU Delft - Old - EWI Sect. ECTM)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

S. Milosavljevic (TU Delft - Electronic Components, Technology and Materials)

C.T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)

T Knezevic (External organisation)

I Spee (External organisation)