Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

Conference paper (2012)

Authors

L.K. Nanver Electronic Components, Technology and Materials - EEMCS
A. Sammak Electronic Components, Technology and Materials - EEMCS
V. Mohammadi Electronic Components, Technology and Materials - EEMCS
KRC Mok External organisation
L. Qi Electronic Components, Technology and Materials - EEMCS
A. Sakic Electronic Components, Technology and Materials - EEMCS
N. Golshani Electronic Components, Technology and Materials - EEMCS
J Derakhshandeh External organisation
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
W.B. de Boer Old - EWI Sect. ECTM
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials