Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

Amir Sammak (TU Delft - Electronic Components, Technology and Materials)

V. Mohammadi (TU Delft - Electronic Components, Technology and Materials)

KRC Mok (External organisation)

L. Qi (TU Delft - Electronic Components, Technology and Materials)

A. Sakic (TU Delft - Electronic Components, Technology and Materials)

N Golshani (TU Delft - Electronic Components, Technology and Materials)

J Derakhshandeh (External organisation)

T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)

WB De Boer (Old - EWI Sect. ECTM)