Extremely ultra-shallow p+-n boron-deposited silicon diodes applied to DUV photodiodes
Conference Paper
(2008)
Author(s)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
T.L.M. Scholtes (TU Delft - Old - EWI Sect. ECTM)
Stoyan Nihtianov (TU Delft - Electronic Instrumentation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:7364d5b5-ffd0-4154-95ef-7dedb34a0489
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
143-144
ISBN (print)
978-1-4244-1942-5
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