Optimizing chemical mechanical polishing process in 3D-IC

Conference paper (2008)

Authors

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials -

M.R. Tajari Mofrad Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

J. van der Cingel Old - EWI Sect. ECTM

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Conference contrib. non-refer.

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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials