Optimizing chemical mechanical polishing process in 3D-IC
Conference Paper
(2008)
Author(s)
J. Derakhshandeh (TU Delft - Electronic Components, Technology and Materials)
MR Tajari Mofrad (TU Delft - Electronic Components, Technology and Materials)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
J van der Cingel (TU Delft - Old - EWI Sect. ECTM)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:79d32c18-5d06-43cb-88c2-40cf768131e8
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
461-464
ISBN (print)
978-90-73461-56-7
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