Airgap-based MEMS optical filters
For the ultraviolet-visible spectrum
Doctoral Thesis
(2016)
Author(s)
M. Ghaderi (TU Delft - Electronic Instrumentation)
Contributor(s)
A.J.P.A.M. Theuwissen – Promotor (TU Delft - Electronic Instrumentation)
Reinoud Wolffenbuttel – Promotor (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
Copyright
© 2016 M. Ghaderi
To reference this document use:
https://doi.org/10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908
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Publication Year
2016
Language
English
Copyright
© 2016 M. Ghaderi
Research Group
Electronic Instrumentation
ISBN (print)
978-94-028-0232-0
Reuse Rights
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