Airgap-based MEMS optical filters

None, None

doi:10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908

Airgap-based MEMS optical filters

For the ultraviolet-visible spectrum

Doctoral Thesis (2016)

Author(s)

Amir Ghaderi (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Contributor(s)

Albert Theuwissen – Promotor (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Reinoud Wolffenbuttel – Promotor (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group

Electronic Instrumentation

Residual stress Optical filter CMOS-compatible Silicon-based Air-gap optical filter

DOI related publication

https://doi.org/10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908 Final published version

To reference this document use

https://doi.org/10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908

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Publication Year

2016

Language

English

Research Group

Electronic Instrumentation

ISBN (print)

978-94-028-0232-0

Downloads counter

368

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