Characterization of defects at the Si/SiO2 interface of a polysilicon-gated MOS system by monoenergetic positrons

Journal Article (1997)
Author(s)

M Clement (TU Delft - QN/Fysics of NanoElectronics)

JMM de Nijs (TU Delft - QN/Fysics of NanoElectronics)

H. Schut (TU Delft - Old - Section Defects in Materials)

A van Veen (TU Delft - Old - sect Radiation Physics Group (TN/RF))

Research Group
QN/Fysics of NanoElectronics
More Info
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Publication Year
1997
Research Group
QN/Fysics of NanoElectronics
Issue number
257
Volume number
255
Pages (from-to)
718-720

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